Perfluorinated Compounds (PFC gases)

PFCs are used in semiconductor fabrication plants because they provide a uniquely effective process performance when etching and are a safer, more reliable source of fluorine, which is required for cleaning certain deposition process chambers. Manufacturers of semiconductor devices have been able to reduce PFC emissions by taking a number of actions including process optimization, use of alternative chemicals, employment of alternative manufacturing processes and improved abatement systems. However, the use of PFC gases in these processes is crucial to the production of semiconductor devices, as there are no effective substitutes outside the fluorinated chemistries that could be used effectively.

2011

ESIA PFC Voluntary Agreement Final Report-November 2011

This final report of the European Semiconductor Industry Association (ESIA) details the industry's voluntary actions from 1995 to 2010 to reduce emissions of PFCs and present 2010 data for the voluntary reduction programme. The European semiconductor industry has surpassed the voluntary PFC goal by reducing absolute emissions by 41% below the 1995 baseline level.

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2007

ESIA 2006 Intermediate Report on reduction of PFC emissions from European semiconductor manufacturing

The EECA-ESIA goal is to reduce by 2010 the ABSOLUTE PFC emissions of the European industry by 10% below the baseline year of emissions in 1995. If no progressive action and investments had been undertaken by the European industry to reduce emissions, these would have increased significantly more than 1995 levels under a business as usual scenario.

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19/05/2005

Semiconductor manufacturers reduce PFC emissions

The world’s semiconductor manufacturers are on track to achieve their goal of reducing atmospheric emissions of perfluorocompounds (PFCs) to 10 percent below baseline levels by 2010, according to the World Semiconductor Council (WSC). PFCs have been identified as global warming gases.

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WSC PFC Emissions Press release

WSC Indexed PFC Emissions - 2005 results

WSTS

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