PFCs are used in semiconductor fabrication plants because they provide a uniquely effective process performance when etching and are a safer, more reliable source of fluorine, which is required for cleaning certain deposition process chambers. Manufacturers of semiconductor devices have been able to reduce PFC emissions by taking a number of actions including process optimization, use of alternative chemicals, employment of alternative manufacturing processes and improved abatement systems. However, the use of PFC gases in these processes is crucial to the production of semiconductor devices, as there are no effective substitutes outside the fluorinated chemistries that could be used effectively.

The world’s semiconductor manufacturers are on track to achieve their goal of reducing atmospheric emissions of perfluorocompounds (PFCs) to 10 percent below baseline levels by 2010, according to the World Semiconductor Council (WSC). PFCs have been identified as global warming gases.

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